CAS: 10026-04-7 Molecular Formula: Cl4Si Molecular Weight (g/mol): 169.89 MDL Number: MFCD00011229 InChI Key: FDNAPBUWERUEDA-UHFFFAOYSA-N Synonym: silicon tetrachloride,silicon chloride,perchlorosilane,silane, tetrachloro,silicon iv chloride,tetrachlorosilicon,chlorid kremicity,silicio tetracloruro di,siliciumtetrachlorid,silicon chloride sicl4 PubChem CID: 24816 IUPAC Name: tetrachlorosilane SMILES: Cl[Si](Cl)(Cl)Cl