Tetraethylammonium hydroxide, 25% w/w in methanol

CAS: 77-98-5 | C8H21NO | 147.26 g/mol

It is used as a phase transfer catalyst, the template agent synthesized by molecular sieve and cleaning agents, as a surfactant, used to anisotropically etch silicon, in thermochemolysis, as a basic solvent in the development of acidic photo resist in the photolithography process.

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